Measuring systemASML
YieldStar S-200B
Measuring system
ASML
YieldStar S-200B
Year of construction
2011
Condition
Used
(fully functional)
Location
Dresden 

Machine data
- Machine type:
- Measuring system
- Manufacturer:
- ASML
- Model:
- YieldStar S-200B
- Year of construction:
- 2011
- Condition:
- excellent (used)
- Functionality:
- fully functional
Price & Location
- Location:
- Heilbronner Str. 22, 01189 Dresden, Deutschland

Call
Details about the offer
- Listing ID:
- A19967480
- Reference number:
- DV10125
- Update:
- 10.09.2025
Description
Optical overlay metrology system, Advanced Semiconductor Materials Lithography stand-alone overlay metrology system for 300 mm wafers, YieldStar S 200B
Model: S200B
Type: YieldStar
Year of manufacture: 2011
Technical data:
Wafer size: 300 mm (12")
Laser source: LPPS, water cooling
General information:
The YSS200B is an optical overlay measurement system used for fast and highly precise measurement of overlay deviations on 300 mm wafers – typically for post-etch monitoring and production process control as a stand-alone system.
Iodpfexbnt Eox Aa Ieic
The listing was translated automatically. Translation errors are possible.
Model: S200B
Type: YieldStar
Year of manufacture: 2011
Technical data:
Wafer size: 300 mm (12")
Laser source: LPPS, water cooling
General information:
The YSS200B is an optical overlay measurement system used for fast and highly precise measurement of overlay deviations on 300 mm wafers – typically for post-etch monitoring and production process control as a stand-alone system.
Iodpfexbnt Eox Aa Ieic
The listing was translated automatically. Translation errors are possible.
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